A VOC sensor based on micromechanical cantilever functionalized with ZNO nanorods

Abstract

This study reports a novel method for volatile organic compound (VOC) detection with a functionalized microcantilever-based sensor. The devices are fabricated with lithography and electrodeposition processes. ZnO nanorods are deposited on Ni microcantilevers in order to expand the total sensitive area. The VOC sensor measurements are carried out with magnetic actuation and optical read out. The phase stability and limit of detection for diethylamine (DEA) were 0.02° and below 100 ppm, respectively. ZnO nanorod coated microcantilevers have potential for VOC sensor especially for amine groups due to the high surface area-to-volume ratio.